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[Analysis Example by EDS] Bonding Interface of Cu Pads

It is possible to view the distribution of each element in two dimensions! This can also be effective when analyzing multilayer samples.

Here, we present an example of EDS analysis at the Cu pad interface. In the qualitative analysis (point analysis) and semi-quantitative analysis of intermetallic compounds, the concentration of contained elements is calculated by examining the intensity (count numbers) of each characteristic X-ray. For intermetallic compounds, it is possible to estimate the formed compounds based on the calculated concentration ratios. Additionally, in line analysis, it is possible to profile the concentration distribution of each element along a specified line in the SEM image, allowing for the observation of changes in element concentration at the analysis location. 【Features of EDS Analysis】 ■ Qualitative analysis (point analysis) and semi-quantitative analysis of intermetallic compounds - Concentration of contained elements is calculated by examining the intensity (count numbers) of each characteristic X-ray - Intermetallic compounds can be estimated based on the calculated concentration ratios ■ Line analysis - Concentration distribution of each element along a specified line in the SEM image can be profiled - Changes in element concentration at the analysis location can be confirmed *For more details, please refer to the PDF document or feel free to contact us.